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CKD micro flow sensor FSM-H-N-100ML-6A
RAPIFLOW series small gas flow sensor, 5–100 mL/min, dual NPN switch outputs + analog output, stainless steel body with Rc1/8 port.
Overview
The CKD RAPIFLOW FSM-H series is designed to monitor very small gas flows. It is widely used to confirm pick-up on SMT placement machine nozzles, detect gas leaks and monitor compressed air consumption. A built-in platinum sensing chip made by silicon micromachining generates very little heat and is highly sensitive, giving stable switch and analog outputs even for tiny flow changes.
The FSM-H-N-100ML-6A measures 5–100 mL/min, has dual NPN switch outputs and one analog output, a stainless steel body (equivalent to SUS316) and an Rc1/8 port for direct installation in existing air lines. The front LCD shows the flow value in real time and supports zero adjustment, peak hold and other functions.
Main specifications
| Item | Details |
|---|---|
| Model | FSM-H-N-100ML-6A |
| Measuring range | 5–100 mL/min |
| Fluid | Air, nitrogen |
| Switch output | 2 × NPN (CH1 / CH2, up to 50 mA) |
| Analog output | 1–5 V (1 channel) |
| Power | DC 24 V |
| Port | Rc1/8 (female taper thread) |
| Body material | Stainless steel (equivalent to SUS316) |
| Display | Integrated LCD |
| Sensing principle | Platinum thermal film (silicon micromachined) |
| Weight | Approx. 40 g |
Typical applications
- SMT nozzle pick-up check: when the placement machine picks a part, the sensor monitors small flow changes in the vacuum nozzle line to judge whether the component was picked successfully. When the flow crosses the set threshold, the switch output tells the PLC to handle the error.
- Gas leak detection: after a sealed container is filled, the FSM-H monitors residual flow in the line. If the flow does not return to zero, there is a leak — useful for air-tightness test stations.
- Compressed air monitoring: installed at a machine’s air inlet to log air consumption per station over time, as a basis for preventive maintenance and energy-saving analysis.
Selection note: the FSM-H series offers four flow ranges (005ML / 010ML / 050ML / 100ML); choose by the actual flow in your line. Output options are N (NPN), P (PNP) or A (analog only). Besides Rc1/8 (6A), a G1/8 port (6G) is available.
Built-in functions
| Function | Description |
|---|---|
| Zero adjustment | Compensates display offset at no flow for an accurate baseline |
| Peak / bottom hold | Records max. and min. flow in a set period to check momentary changes |
| Switch mode setting | 4 operating modes with ON / OFF set values for flexible trigger logic |
| Test output | Forces the switch ON to check wiring and the receiving device |
| Hysteresis | 1% F.S. added automatically to avoid chattering near the threshold |
Purchasing: for automated lines that need micro gas flow monitoring; equipment departments and system integrators are welcome to request a quote.
Related: SMC pressure switches ISE20A / ZSE · Panasonic vacuum pressure sensor DP-101 · KEYENCE vacuum pressure sensor AP-C30W
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