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Inline plasma cleaner JHPBT-390

Cleans and activates camera modules and wafers before dispensing, wire bonding and lamination.

Overview

After wet cleaning, fine dirt and residue can remain; plasma treatment removes them. JHPBT-390 consists of a conveyor, barcode reader, plasma cleaning unit and buffer module: it loads automatically, reads the carrier barcode, plasma-cleans, then unloads or sends to the buffer.

It can link to upstream and downstream stations or run standalone with its own loading. The frame and covers are double-sided mirror-finish SUS304 sheet, designed for Class 100 cleanrooms. Throughput over 60 UPH; processing temperature below 45 °C.

Process flow: auto loading → carrier barcode reading → plasma cleaning → auto unloading / buffer.

Specifications

ItemValue
ModelJHPBT-390
Size (L × W × H)1200 × 1000 × 1620 mm
Conveyor height950 ± 50 mm
Throughput> 60 UPH
Workpiece sizeL 50–400 × W 50–350 mm
MaterialSUS304 double-sided mirror finish
Cleaning methodPlasma
Particle removal≥ 1 µm, over 99.6%
Processing speed20 mm/s (depends on surface)
Processing height2–10 mm
Processing temperatureBelow 45 °C
Clean dry air pressure0.45–0.7 MPa
Clean dry air qualityFiltered to 0.01 µm, over 99.9%
Nitrogen pressure0.45–0.7 MPa
Nitrogen purity> 99.99%
Exhaust capacity3.0 m³/min
ControlPLC + touch screen
PowerAC 380 V / 60 Hz / 2.5 kW (other voltages on request)
Weightapprox. 600 kg

Features

  • Inline or standalone: link to adjacent stations, or run alone with auto loading.
  • Carrier barcode reading, MES-ready: traceable carriers.
  • Cleanroom build: mirror-finish SUS304, for Class 100 areas.
  • Working height 950 mm, adjustable feet ± 50 mm for docking.

Which one to choose

  • Camera modules and wafers, inline plasma cleaning: JHPBT-390.
  • Vacuum chamber inline for COB and BGA substrates: JHPBT-590.
  • Batch treatment of PCB, FPC, ceramics and plastics: JHPBT-290.
  • Wet cleaning before plasma: centrifugal cleaner JHPBT-550.

Request a quote

Tell us the product, carrier size, required UPH and the stations it must connect to. Request a quote →

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