What wet cleaning cannot remove is not dirt but a lack of surface activity. If wafers, COB packages and camera modules carry organic residue or poor surface activity before wire bonding, dispensing or encapsulation, adhesion and yield in later steps suffer.
The JHPBT-590 inline vacuum plasma cleaner treats parts with dry plasma in a vacuum chamber and connects inline between upstream and downstream equipment. After cleaning, the water contact angle can drop below 20°, a single treatment takes under 60 seconds, and treatment temperature stays below 45 °C, so components are not heat-stressed.
Applications
- Precision cleaning of all kinds of wafers and COB packages
- Camera modules and IC-packaged camera modules
- LED / chip lead frames
- BGA substrates
Machine structure
Loading / unloading system, material transfer system, plasma cleaning system, vision monitoring system, tray moving mechanism, conveyor, material gripping mechanism, pusher mechanism, sensor detection system, control panel, work table and machine frame.
Specifications
| Item | Spec |
|---|---|
| Model | JHPBT-590 |
| Cleaning method | Inline (connects to upstream and downstream equipment; parts cleaned in a vacuum chamber) |
| Plasma generator power | 0–600 W adjustable / 13.56 MHz RF |
| Vacuum system | Pirani vacuum gauge; oil-type vacuum pump |
| Vacuum pump speed | 40 m³/h (two-stage rotary vane pump) |
| Control system | PLC, touch screen and industrial electrical components |
| Aluminium alloy sealed chamber | 385 × 320 × 115 mm (L × W × H), customisable |
| Effective cleaning area | 270 × 210 mm |
| Part size range | Max. 270 × 210 × 30 mm, min. 50 × 50 × 1 mm (L × W × H) |
| Compatible size | Max. 270 × 210 × 40 mm (L × W × H) |
| Process gases | Ar / N₂ / O₂ / CDA / CF₄ / H₂ and others |
| Gas lines | 2 (two or more gases can be connected at the same time) |
| Process gas flow meter range | 0–300 SCCM |
| Working gas | Water-free, oil-free compressed air |
| Cleaning time | Under 60 s per treatment |
| Treatment temperature | Below 45 °C |
| Cleaning result (water contact angle) | Below 20° |
| MES | Reserved; supports barcode scan upload |
| Machine size | 1200 × 1000 × 1815 mm (L × W × H) |
Request a quote
Send the part number, machine model, quantity and supply type. Request a quote →